@TechReport{Dartmouth:TR2005-553,
  author = {Bruce R. Donald and Christopher G. Levey and Craig D. McGray and Igor Paprotny and Daniela Rus},
  title = {{An Untethered, Electrostatic, Globally Controllable MEMS Micro-Robot: Supplementary videos}},
  institution = {Dartmouth College, Computer Science},
  address = {Hanover, NH},
  number = {TR2005-553},
  year = {2005},
  month = {August},
  comment = {
    This technical report is a multimedia web page, available at
    <a href="http://www.cs.dartmouth.edu/reports/TR2005-553.CD/index.html">
    http://www.cs.dartmouth.edu/reports/TR2005-553.CD/index.html
    </a>
  },
  abstract = {
    We present a steerable, electrostatic, untethered, MEMS micro-robot,
    with dimensions of 60&nbsp;&micro;m by 250&nbsp;&micro;m by
    10&nbsp;&micro;m. This micro-robot is <B>1 to 2 orders of magnitude
    </B> smaller in size than previous micro-robotic systems. The device
    consists of a curved, cantilevered steering arm, mounted on an
    untethered scratch drive actuator. These two components are fabricated
    monolithically from the same sheet of conductive polysilicon, and
    receive a common power and control signal through a capacitive
    coupling with an underlying electrical grid. All locations on the grid
    receive the same power and control signal, so that the devices can be
    operated without knowledge of their position on the substrate and
    without constraining rails or tethers. Control and power delivery
    waveforms are broadcast to the device through the capacitive power
    coupling, and are decoded by the electromechanical response of the
    device body. Individual control of the component actuators provides
    two distinct motion gaits (forward motion and turning), which together
    allow full coverage of a planar workspace (the robot is globally
    controllable). These MEMS micro-robots demonstrate turning error of
    less than 3.7&nbsp;&deg;/mm during forward motion, turn with radii as
    small as 176&nbsp;&micro;m, and achieve speeds of over
    200&nbsp;&micro;m/sec, with an average step size of 12&nbsp;nm.  They
    have been shown to operate open-loop for distances exceeding
    35&nbsp;cm without failure, and can be controlled through
    teleoperation to navigate complex paths. This document contains movies
    showing the actuation of the micro-robots during open-loop actuation
    and teleoperation experiments.  The videos have been sped up for ease
    of viewing.  On each video, the time-scale is noted in the lower-right
    corner of the screen.
  }
}