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The scratch drive devices must remain attached to their underlying
substrate throughout the fabrication process. However, they must
be detached from the substrate prior to operation. So, a release
mechanism is required. We would like this release mechanism to be
compatible with batch fabrication. i.e. the devices should be able
to self-release.
To accomplish this, the scratch drives are originally suspended
above the substrate by a long thin beam. The beam is intentionally
flawed where it joins the scratch drive plate. When voltage is
first applied to the electrodes beneath the scratch drive, the
electrostatic attraction draws the device towards the substrate.
The resulting deformation stress in the beam is concentrated at
the intentional flaw. The beam then snaps at the flaw and the
device is released.
Last modified:
2005-04-06