Dartmouth College Computer Science
Technical Report series
TR search TR listserv
|By author:||A B C D E F G H I J K L M N O P Q R S T U V W X Y Z|
|By number:||2019, 2018, 2017, 2016, 2015, 2014, 2013, 2012, 2011, 2010, 2009, 2008, 2007, 2006, 2005, 2004, 2003, 2002, 2001, 2000, 1999, 1998, 1997, 1996, 1995, 1994, 1993, 1992, 1991, 1990, 1989, 1988, 1987, 1986|
We present a steerable, electrostatic, untethered, MEMS micro-robot,
with dimensions of 60 µm by 250 µm by
10 µm. This micro-robot is 1 to 2 orders of magnitude
smaller in size than previous micro-robotic systems. The device
consists of a curved, cantilevered steering arm, mounted on an
untethered scratch drive actuator. These two components are fabricated
monolithically from the same sheet of conductive polysilicon, and
receive a common power and control signal through a capacitive
coupling with an underlying electrical grid. All locations on the grid
receive the same power and control signal, so that the devices can be
operated without knowledge of their position on the substrate and
without constraining rails or tethers. Control and power delivery
waveforms are broadcast to the device through the capacitive power
coupling, and are decoded by the electromechanical response of the
device body. Individual control of the component actuators provides
two distinct motion gaits (forward motion and turning), which together
allow full coverage of a planar workspace (the robot is globally
controllable). These MEMS micro-robots demonstrate turning error of
less than 3.7 °/mm during forward motion, turn with radii as
small as 176 µm, and achieve speeds of over
200 µm/sec, with an average step size of 12 nm. They
have been shown to operate open-loop for distances exceeding
35 cm without failure, and can be controlled through
teleoperation to navigate complex paths. This document contains movies
showing the actuation of the micro-robots during open-loop actuation
and teleoperation experiments. The videos have been sped up for ease
of viewing. On each video, the time-scale is noted in the lower-right
corner of the screen.
This technical report is a multimedia web page, available at
Bibliographic citation for this report: [plain text] [BIB] [BibTeX] [Refer]
Or copy and paste:
Bruce R. Donald, Christopher G. Levey, Craig D. McGray, Igor Paprotny, and Daniela Rus, "An Untethered, Electrostatic, Globally Controllable MEMS Micro-Robot: Supplementary videos." Dartmouth Computer Science Technical Report TR2005-553, August 2005.
Notify me about new tech reports.
Search the technical reports.
To receive paper copy of a report, by mail, send your address and the TR number to reports AT cs.dartmouth.edu
Copyright notice: The documents contained in this server are included by the contributing authors as a means to ensure timely dissemination of scholarly and technical work on a non-commercial basis. Copyright and all rights therein are maintained by the authors or by other copyright holders, notwithstanding that they have offered their works here electronically. It is understood that all persons copying this information will adhere to the terms and constraints invoked by each author's copyright. These works may not be reposted without the explicit permission of the copyright holder.
Technical reports collection maintained by David Kotz.